A PIEZOELECTRIC MICROPUMP BASED ON POLYMERIC MICROMACHINING

摘要

This paper presents a functional, fully polymeric micropump. The pump was fabricated with a novel polymeric micromachining process, which is a combination of three basic techniques: thick-resist photolithography, laser cutting, and adhesive lamination. The pump is able to deliver a maximum flow rate of 2.6 ml/min and a backpressure of 1.4 m water (13.7 kPa). The micropump was made of different laminated polymer layers. The pump body was fabricated in PMMA (polymethylmethacrylate) with laser cutting techniques. The checkvalves were made of SU8 2100. The PMMA- and SU8-layers were laminated using adhesive layers, which are selectively cut by CO_2-laser.