We report on a fabrication of a piezoelectric micropump driven by traveling waves and the flow characteristics in a microchannel. The microacuator for the fluid flow was composed of PZT bimorph beams which were allocated with a gap of 0.2 mm alternately and traveling waves were generated on the surface of the microchannel. We evaluated the conversion efficiency between vibrational energy of the channel wall and kinetic energy of liquid flow, and obtained high energy efficiency of 12%. This result indicates that the pumping system using traveling waves shows high efficiency which is suitable for the mobile microfluidic devices of μ-TAS applications.
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