Characterization of TiO/sub 2//SiO/sub 2/ hybrid sol-gel glass and its use for fabrication of micro-optical elements

摘要

We demonstrated fabrication of micro-optical elements in a TiO/sub 2//SiO/sub 2/ hybrid sol-gel glass with different facilities including HEBS gray scale mask, laser direct writer and e-beam lithography. With different facility, we first calibrated this material and then designed and fabricated micro-optical elements according to calibration result. Micro-optical elements including blazed gratings and microlenses were fabricated successfully.