PHASE SHIFTING LOW-COHERENCE INTERFEROMETRY BY GRATING BASED AXIAL-PHASE-SHIFTER

摘要

A chromatic axial-phase-shifter for low-coherence phase-shifting interferometry is proposed. This axialphase- shifter makes wavelength-independent phase delay between two beams. Owing to its wavelength-independent property, it is possible to achieve phase shifting in low-coherence interferometry. By employing this system, the envelope of low-coherence interferograms is successfully extracted.