首页> 外国专利> PHASE-SENSITIVE LOW-COHERENCE INTERFEROMETRY APPARATUS

PHASE-SENSITIVE LOW-COHERENCE INTERFEROMETRY APPARATUS

机译:相敏低相干干涉仪

摘要

The invention relates to an interferometry apparatus (100) for measuring at least one parameter of a sample (S) comprising: first (S1) and second (S2) sources, respectively, of first (So1) and second (So2) electromagnetic radiations, having distinct wavelengths and time coherences; interference means (50) of said radiations to provide a combination electromagnetic signal (Soc2) of first (Soi1) and second (Soi2) interference electromagnetic signals between portions, of first and second radiations, respectively. The apparatus being characterized in that it further comprises: a device (PD) for converting the combination electromagnetic signal (Soc2) into a corresponding combined electric signal (Sce) and separation electronic means (F-B) of the combined electric signal (Sce) into first (Se1) and second (Se2) electric signals representative of said interference signals (Soi1, Soi2), respectively.
机译:本发明涉及一种用于测量样品(S)的至少一个参数的干涉仪设备(100),其包括:第一(So1)和第二(So2)电磁辐射的第一(S1)和第二(S2)源,具有不同的波长和时间相干性;所述辐射的干涉装置(50)以分别在第一和第二辐射的部分之间提供第一(Soi1)和第二(Soi2)干涉电磁信号的组合电磁信号(Soc2)。该设备的特征在于,该设备还包括:设备(PD),用于将组合电磁信号(Soc2)转换为相应的组合电信号(Sce),并且将组合电信号(Sce)的分离电子装置(FB)转换为第一装置。 (Se1)和第二(Se2)电信号分别代表所述干扰信号(Soi1,Soi2)。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号