Noncontact three-dimensional surface profiling using reflected-light holographic confocal microscopy

摘要

This article deals with an application of the broad-source image plane holography, which offers nonscanning confocal imaging, i.e., real time imaging. We have developed a laboratory version of a holographic confocal microscope (HCM). By the measurement of the axial intensity response for a perfect plane mirror we have verified the confocal imaging capability with the depth discrimination. The noncontact surface profiling possibility was verified by processing series of optical sections with consequent 3D reconstruction of the real surface profile.