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Microfabrication of Vacuum Compatible Millimeter Wave Sources

机译:真空兼容毫米波源的微制造

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摘要

RF sources at millimeter wavelengths encounter significant problems in manufacturing for two reasons. First, the device dimensions vary inversely with operating frequency. Second, as the frequency increases, skin depths shrink and circuit losses increase. This means that the surface finish of the RF circuits must improve while the fabrication tolerances become more difficult to achieve. This has forced the adoption of alternate circuit fabrication methods that are significantly different from the lathe and mill machining used in lower frequency devices.
机译:RF光源以毫米波长在制造中遇到了两个原因的重大问题。首先,设备尺寸随工作频率而变化。其次,随着频率的增加,肤浅缩小和电路损耗增加。这意味着RF电路的表面光洁度必须改善,而制造公差变得更加难以实现。这已强制采用替代电路制造方法,该方法与下频率装置中使用的车床和轧机加工显着不同。

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