The Applicability Of Conventional Fiber Texture Analysis Techniques In Electron Backscatter Diffraction

摘要

Textures in thin films often exhibit fiber textures. A set of analyses has been developed for quantitative characterization of fiber textures using X-Ray diffraction. These analysis techniques are generally based on rocking curve analysis or the reduction of pole figures into pole plots. The height and width of these plots are analyzed and characteristic measures such as peak and random fractions are extracted. These analysis techniques can be duplicated for texture measurements obtained by electron backscatter diffraction (EBSD) in the scanning electron microscope (SEM). However, differences have been observed in results obtained by EBSD and X-Ray diffraction. The causes of these differences are examined, In light of these comparisons a methodology for implementing the conventional fiber texture analysis techniques for EBSD data are proposed