Kinetic steady states in knudsen effusion cells

摘要

It is generally assumed that Knudsen effusion cells operate under equilibrium conditions. When severe kinetic limitations exist for vaporization, characterized by small evaporation and condensation coefficients, the effusion cell attains a non-equilibrium steady-state condition which can be described by introducing the different flows exchanged in the cell. Among the methods that can be used to determine the different coefficients, this paper will focus on the high temperature mass spectrometry with multiple cells method.