Consolidation of SiC Powder Coated with SiO_2 Nano-layer by Spark Plasma Sintering

摘要

Silica (SiO_2) nano-layer was coated on silicon carbide (SiC) powder by rotary chemical vapor deposition (RCVD). The SiC/Si02 composite were consolidated by spark plasma sintering (SPS) at 1923 K using the SiO_2 coated SiC powder. The relative density and hardness of the SiC/SiO_2 composites increased with increasing SiO_2 content, and were 97% and 17 GPa, respectively, at SiO_2 content of 22 mass%. The relative density and hardness of a composite consolidated using the mixture powders of SiC and SiO_2 (22 mass%) at 1923 K were 81% and 8 GPa, respectively.