Hydroxyapatite Formation on MOCVD-CaTiO_3 Coated Ti

摘要

Ca-Ti-O films were prepared by MOCVD using Ca(dpm)_2 and Ti(OiPr)_2(dpm)_2 precursors. The phases, composition and morphology of Ca-Ti-O films changed depending on the molar ratio of Ca to Ti precursors (R_(Ca/Ti)), total pressure (P_(tot)) and substrate temperature (T_(sub)). CaTiO_3 films in a single phase were obtained at T_(sub) = 973 and 1073 K. CaTiO_3 films prepared at 873 K had a dense structure and smooth surface. CaTiO_3 films prepared at T_(sub) = 1073 K had complicated rough surface with a cauliflower-like texture. Hydroxyapatite (HAp) formed in 3 days on the CaTiO_3 film prepared at T_(sub) = 1073 K.