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Improvement of multilayer analyses with a three dimensional atom probe

机译:用三维原子探测改进多层分析

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Owing to their giant magnetoresistance properties, multilayer thin film materials (MLFs) are widely used in information storage technology. However, because this magnetic behaviour is highly sensitive to the roughness and diffuseness on a sub-nanometer scale, the structural characterisation of these materials with high spatial resolution is of fundamental importance in understanding the properties. The three-dimensional atom probe (3DAP) is one of the instruments that can theoretically offer the best analysing performance on such materials [1, 2]. However, 3DAP reconstructions of MLF samples are found to be affected by strong artefacts due to differences in evaporation field between chemical species (fig 1a). It is therefore essential to associate experimental analyses to theoretical investigations of the evaporation and reconstruction process to obtain the best reconstructions from these materials.
机译:由于它们的巨大磁阻性能,多层薄膜材料(MLF)广泛用于信息存储技术。然而,由于这种磁性行为对亚纳米级的粗糙度和扩散非常敏感,因此具有高空间分辨率的这些材料的结构表征在理解性质方面具有基本的重要性。三维原子探测器(3DAP)是理论上可以在这些材料上提供最佳分析性能的仪器之一[1,2]。然而,发现MLF样品的3DAP重建是由于化学物质(图1A)之间的蒸发场的差异而受到强烈的伪影的影响。因此,必须将实验分析与蒸发和重建过程的理论研究联系起来,以获得来自这些材料的最佳重建。

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