Piezoelectric-Actuated Deformable Mirror for Adaptive Optics

摘要

Basic properties of a piezoelectric-actuated deformable mirror device are reported, and the possibility of compensating for the aberration of a multilayer blue-ray disc system is discussed. The mirror device was distorted by a poling process, but the distortion was almost symmetrical about the center of the mirror. The slight asymmetry could be compensated for by adjusting the voltage applied to each actuator. The aberrations of an optical system can simillary be compensated for by adjusting the applied voltage. Experimental results show that aberrations can be reduced to less than 50 mλ.