Scanning Near-field Optical Microscopy Probe Integrated with Photoconductive Antenna for Terahertz Time-domain Spectroscopy

摘要

In this paper, we report on the design, fabrication of a scanning near-field optical microscopy (SNOM) probe for terahertz (THz) time-domain spectroscopy. The probe is integrated with zinc oxide (ZnO) photoconductive antennas as a THz emitter and the detector. A ZnO thin film is deposited by rf magnetron sputtering on a silicon substrate. The resistivity of the deposited ZnO was 2.3×10{sup}5 Ω·cm. A THz-SNOM probe integrated with the ZnO photoconductive antenna is fabricated by a bulk-micromachining technology.