Scanning microscope probe distance evaluation method, e.g. for scanning near-field optical microscopy; uses detected oscillation amplitude, frequency or phase of probe subjected to lateral and superimposed vertical oscillation

摘要

The method involves oscillating the probe (1) in a lateral direction relative to the scanned object surface (5) and superimposing a vertical oscillation of the probe, with detection and evaluation of the oscillation amplitude, frequency or phase, to determine the probe distance from the scanned surface. Independent claims are also included for the following: (a) a distance regulation method; (b) an imaging method; (c) a scanning microscope