STRAIGHTNESS CONTROL OF A LONG-STROKE, HIGH-PRECISION, SCANNER STAGE

机译：直行程，高精度，扫描仪阶段的直线控制

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摘要

This paper summarizes a new straightness control algorithm, developed and applied to a long-stroke, high-precision scanner stage.

机译：本文总结了一种新的直线度控制算法，开发并应用于长冲程，高精度扫描仪阶段。

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《American Society for Precision Engineering Annual Meeting》|2015年|1(CD-ROM)|共4页
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Shiva Ram Krishna; Sang-Hyun Park; Sangdon Jang;
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中图分类 TH7-53;
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STRAIGHTNESS CONTROL OF A LONG-STROKE, HIGH-PRECISION, SCANNER STAGE

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