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SUBWAVELENGTH OPTICAL ELEMENTS (SOEs) ― A PATH TO INTEGRATE OPTICAL COMPONENTS ON A CHIP

机译:子波长光学元件(SOE) - 一种用于对芯片上的光学组件集成的路径

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We presented a special class of optical devices, SOEs, which have feature size smaller than the wavelength of light and hence no non-zero order diffraction. SOEs are dramatically different from bulk optics (i.e., ray optics) and diffractive optics in a number ways. First, SOEs can perform conventional bulk optics' functions, but with a size orders of magnitude smaller than bulk optics. Second, different SOEs (hence different functions) can be made using the same materials but different nano-patterns, rather than different materials as bulk optics require. These two advantages make SOEs intrinsically suited for integration on a chip. As a third advantage, SOEs can offer new functionalities that bulk or diffractive optics do not have. The excellent properties, ultra-thin and small size, easiness of integration into devices through both horizontal and vertical means make the SOEs be of great potential for photonic applications. Furthermore, nanoimprint lithography with capabilities of sub-10 nm resolution and high throughput offers volume production of the SOEs cost-effectively.
机译:我们介绍了一类特殊的光学器件,使具有小于光波长的特征尺寸,因此没有非零阶衍射。 SOES以数字方式与散装光学(即射线光学)和衍射光学器件显着不同。首先,SOES可以执行传统的散装光学功能,但尺寸的尺寸小于散装光学元件。其次,可以使用相同的材​​料但不同的纳米图案,而不是不同材料作为散装光学器件所需的不同材料,而是不同的SOE(因此不同的功能)。这两个优点使得本座本质上适合于芯片上的集成。作为第三个优势,国有企业可以提供批量或衍射光学器件的新功能。优异的性能,超薄和小尺寸,通过水平和垂直装置整合到装置中的容易性使得SOE具有很大的光子应用潜力。此外,纳米压印光刻具有亚10 nm分辨率和高通量的能力,可有效地提供了SOE的批量生产。

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