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Stick-Slip Squeal in a Dry Scroll Vacuum Pump

机译:在干燥的涡旋式真空泵中粘附尖叫

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Vacuum pumps have been described as compressors for rarefied gases. For more than twenty-five years the scroll compressor principle has been used in designing vacuum pumps that do not rely on oil to provide their pumping action. The dry scroll vacuum pump has been particularly successful as a source of rough vacuum for analytical instruments such as liquid-chromatography or gas-chromatography mass spectrometers. Such instruments are typically located in quiet laboratory environments where the scroll vacuum pump may be the only significant source of noise. Consequently, quiet operation is a key requirement of dry scroll vacuum pumps. This paper discusses an occurrence of stick-slip squeal that developed during the design of a new model, low noise, dry scroll pump. Stick-slip phenomena and the associated noise are the result of "self-excited" oscillations related to the difference between static and sliding friction. Rapidly oscillating friction forces occurring during a portion of the orbital cycle can result in induced vibration of the participating surfaces and structure, which radiate high-pitched noise. In the case described, considerable effort was expended in developing a quiet pump design. However, a loud "chirping" noise found in a few late-stage prototypes caused a good deal of concern. It was necessary quickly to fully characterize the vibration behavior within the pump related to the noise and to develop design modifications to ensure that the noise was eliminated. The characteristics of the noise are described for the scroll pump along with the methods utilized to eliminate it from the design.
机译:真空泵已被描述为用于稀土气体的压缩机。超过二十五年,涡旋压缩机原理已用于设计不依赖油的真空泵以提供泵送动作。干燥涡旋真空泵是特别成功的作为诸如液相色谱或气相色谱质谱仪的分析仪器的粗糙真空源。这些仪器通常位于静止的实验室环境中,涡旋真空泵可能是唯一重要的噪声来源。因此,安静的操作是干涡旋真空泵的关键要求。本文讨论了在新模型,低噪声,干滚动泵设计期间开发的粘滑尖锐的发生。粘滑现象和相关噪声是与静态和滑动摩擦之间的差异有关的“自我激发”振荡的结果。在轨道循环的一部分期间发生的快速振荡摩擦力可以导致参与表面和结构的诱发振动,其辐射高倾斜噪声。在描述的情况下,在开发安静的泵设计时消耗了相当大的努力。然而,在一些后期原型中发现的响亮的“唧唧喳喳”噪音引起了很多问题。有必要快速地表征与噪声相关的泵内的振动行为,并开发设计修改,以确保消除了噪声。涡旋泵描述了噪声的特性以及用于从设计中消除它的方法。

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