Design for Reliability of MEMS/MOEMS for Lightwave Telecommunications

摘要

The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between Component/ Subsystem/ System Design, Fabrication, Packaging, Manufacturing and Reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.