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Membrane-based photonic crystal light sources

机译:基于膜的光子晶体光源

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Highly compact microlasers integrated on silicon, emitting in the 1.3-1.6μm range are important building blocks for future photonic integrated circuits that could be developed for applications such as optical interconnects. In-plane emission and low threshold are desired for these devices, to be compatible with dense photonic integration. In this presentation, we report on the fabrication of InP membrane laser micro-sources integrated on a silicon wafer, based on 2D Photonic Crystal (PC) structures. The PC consists in a triangular lattice of holes formed in the thin membrane. The basic integration procedure includes wafer scale InP transfer onto silicon via SiO2-SiO2 bonding and conventional nanofabrication technologies (see figure 1).
机译:在硅片上集成的高度紧凑的微加可在1.3-1.6μm的范围内发出,是未来光子集成电路的重要构建块,可以为诸如光学互连等应用。这些器件需要面内发射和低阈值,与致密的光子集成相容。在本文中,我们基于2D光子晶体(PC)结构,报告在硅晶片上集成的InP膜激光微源的制造。 PC由形成在薄膜中形成的三角晶格中。基本积分过程包括通过SiO2-SiO2键合和常规纳米制作技术将晶片标度InP转移到硅上(见图1)。

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