Thin foils as essential parts of micro-electro-mechanical devices (MEMs) are dynamically loaded in a wide spectrum of frequencies ranging from much less than 1 Hz (i.e. almost monotonically strained by thermal fluctuations) up to the order of MHz (due to their use in very fast switches). For the design of MEMs in order to assure safe operation it is of increasing demand to rely upon accurate fatigue data. In the present investigation the fatigue and fracture behaviour of free standing foils in the thickness range of 20 μm to 250 μm has been determined.
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