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Dual-frequency Laser Interferometry of Rotating Angle Measurement With a Grating Wedge-Plate

机译:用光栅楔形板旋转角度测量的双频激光干涉测量

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A new method of rotating angle measurement with dual-frequency laser interferometry using a grating wedge-plate is described here. A grating wedge-plate is formed by making a reflecting flare grating on a glass wedge-plate. The principle of the grating wedge-plate is introduced and its application in the rotating angle measurement system is provided. The setup and principle of the system are also introduced. This system can be applied not only to small angle measurement but also to dynamic random angle measurement. An experiment of rotating angle measurement is given. The measuring range of angle is up to 360° and the measurement accuracy is better than 0.5 arc sec. High precision, stability and immune to errors are the distinguished features of this interferometer.
机译:这里描述了一种使用光栅楔形板的双频激光干涉测量旋转角度测量的新方法。通过在玻璃楔形板上制造反射光栅格式形成光栅楔形板。引入光栅楔板的原理,并提供其在旋转角度测量系统中的应用。还引入了系统的设置和原理。该系统不仅可以应用于小角度测量,还可以应用于动态随机角度测量。给出了旋转角度测量的实验。测量范围可达360°,测量精度优于0.5弧秒。对误差的高精度,稳定性和免疫是该干涉仪的杰出特征。

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