Development of Silicon Based Microchannel for Gas Chromatograph Column

摘要

The current study develop a MEMS-based micro-GC system incorporating a serpentine column with dimensions of 2 m x 200 μ x 115 μ (length x width x depth). The channel is etched into a silicon substrate with dimensions 28 x 28 mm~2 using wet etching. The device is sealed by anodic bonding technique using Pyrex glass wafer. This fabrication method raises the possibility for a low cost mass production.