Influence of molecular weight of organic contaminants upon adsorption behaviors onto silicon surfaces

摘要

The adsorption behaviors of organic contaminants on wafer substrate surfaces have been investigated. We found the adsorption enthalpy of organic hydrocarbons onto the silicon surface becomes large as the molecular weight (MW) of contaminants increases. Based on these research results, we will explain the influence of the molecular weight of organic hydrocarbons upon adsorption behaviors onto silicon surfaces and suggest a model of adsorption behaviors of various hydrocarbons onto wafers.