A pneumatic pressure sensor employing an opto-electronic coupling arrangement attached to a diaphargm

摘要

A novel pneumatic pressure sensor employing a metallic flexible and parabolic shaped diaphragm incorporating an opto-electronic coupling is proposed. Dynamic variation in pressure causes variations in deformations in the surface of the diaphragm elastically, and the opto-electronic coupling arrangement detects this deformation and the exerting pressure acting on the diaphragm is computed. The deflection angle of the laser beam originated on a mirror attached to a the chosen point over the surface of the diaphragm and returned to a photo sensitive mosaic provides information about the pressure. The excited cell is determined by photo scanning process and a lookup table is used to obtain the instantaneous pressure.