Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems (MOEMS)

摘要

The emerging technology of micro-optical-eiectro-mechanical systems (MOEMS or optical MEMS) offers promise for automating the alignment of free-space optical systems, especially intra-computer optical interconnects (e.g., board-to-board communications). MOEMS-based microlenses and micromirrors have been fabricated for the purpose of providing initial system alignment and dynamic (or operational) alignment.