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PLASMA-CHEMICAL SYNTHESIS OF NANOPOWDER NITRIDES

机译:纳米粉末氮化物的等离子体化学合成

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Nanopowders (NP) of A1N, Mg_3N_2, Si_3N_4 and TiN have been synthesized in a "cold wall" or "warm wall" plasma chemical reactor (PCR), under the conditions of quasi-equilibrium electric-arc low-temperature plasma (LTP) starting from Al, Mg, Si, Ti powder and N_2, respectively. The degree of nitride-formation is limited by the concentration of atomic nitrogen in the PCR (A1N) and the reagents' residence time in the optimum temperature zone of the PCR (Mg_3N_2, Si_3N_4 and TiN). The NP nitrides synthesized under the conditions of electric-arc LTP have predominantly a spherical shape of the nanoparticles (the condensation follows generally the mechanism: vapours ― liquid ― solid body), while the NP nitrides synthesized under the conditions of HF hot plasma have well-formed microcrystals in the corresponding syngony (the condensation mainly follows the mechanism: vapours ― solid body). Some physico-chemical parameters, like specific surface (dispersity), degree of nitride formation, etc have been studied. Zero porosity of the plasma-chemically synthesized NP nitrides achved the decrease in the hot-molding temperature makes them superior to their conventional analogues with respect to the application in microelectronics and powder metallurgy.
机译:A1N,Mg_3N_2,Si_3N_4和锡的纳米孔(NP)在“冷壁”或“温壁”等离子体化学反应器(PCR)中合成,在准平衡电弧低温等离子体(LTP)条件下合成从Al,Mg,Si,Ti粉末和N_2开始。氮化物形成程度受PCR(A1N)中原子氮的浓度和试剂在PCR(Mg_3N_2,Si_3N_4和锡)的最佳温度区中的停留时间的限制。条件电弧LTP下合成的NP氮化物主要具有纳米颗粒的球形(缩合通常遵循机制:蒸气 - 液体 - 固体),而HF热等离子体的条件下合成的NP氮化物具有良好相应的合成中的缩小微晶(冷凝主要遵循机制:蒸汽 - 固体)。已经研究了一些物理化学参数,如具体表面(分散性),氮化物形成等。等离子体化学合成的NP氮化物的零孔隙率达到热成型温度的降低使其优于其常规类似物相对于微电子和粉末冶金的应用。

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