DIAMOND TURNING INDUCED SURFACE DAMAGE IN SILICON INVESTIGATED BY MEANS OF RAMAN SPECTROSCOPY AND MICROSCOPY TECHNIQUE

摘要

This paper presents an investigation on the extent of damage induced by ductile diamond turning on the surface structure by means of Raman scattering and microscopy techniques. Transmission Electron Microscopy (TEM) cross section view of the surface was successfully performed in order to clear whether there is any remnant crystal structure. Raman spectroscopy was applied on ductile/brittle mode machined surfaces in order to correlate the structural disorder observed by TEM. Atomic force microscopy (AFM) was used to probe the surface generated in the ductile mode in the nanometer range.