On the Fabrication of Fresnel Lens Array in Soft Semiconductor Crystal by use of Ultraprecision Diamond Turning

摘要

An array of Fresnel lenses was machined on the surface of single crystal (100) InSb sample with a half radius negative rake (-25°) single point diamond tool. The lens has paraxial domains [1] having aspheric phase profile. The sample was examined by scanning electron microscopy and an optical profiler. The machined surface and the chips presented an amorphous phase probed by micro Raman spectroscopy. Ductile ribbon-like chips were observed on the cutting tool rake face. No sign of cutting edge wear was observed on the diamond tool.