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Manufacturing of diffractive microstructures using an open loop nanometerstroke Fast Tool Servo system

机译:使用开环纳米轨道快速工具伺服系统制造衍射微结构

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Diffractive optical elements (DOEs), manufactured in process chains consisting of many steps for making bulk products, have become a key element in many optical systems. Unfortunately, with no alternative to lithographic or laser beam techniques in sight, no economic manufacturing technique for the single piece production of DOEs exists. The LFM together with the Bremer Institut fur angewandte Strahltechnik (BIAS) is currently developing an adapted diamond turning process using a nanometerstroke Fast Tool Servo that will change this situation.
机译:在工艺链中制造的衍射光学元件(DO)制造,包括制造散装产品的许多步骤,已成为许多光学系统中的关键元件。不幸的是,在视线中没有替代光谱或激光束技术,没有用于单件生产的经济制造技术。 LFM与乌尔默Institut fur Angewandte Strahltechnik(偏置)一起使用将改变这种情况的纳米段落快速工具伺服开发适用的金刚石转动过程。

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