Reflection moire for high spatial resolution

摘要

A new technique is proposed to keep a high spatial resolution when using both a reflection moire and using an integrating-bucket phase shifting method. In moire' method an image includes high spatial frequency components of the gratings and the second harmonics of them besides moire' fringe. These high frequency components cause measurement error when using phase shifting technique. By combining these two methods for a reflection moire' we realized to eliminate both the high frequency components of gratings and the second harmonics of them with keeping high-speed measurement. We proved that theory of the new technique and good experimental results.