A diaphragm type (100) dominant oriented tetragonal phase lead zirconate titanate (PZT) film actuator is fabricated. The ferroelectric properties of the texture controlled PZT film is relatively good compared with other reported data and is comparable to those of bulk PZT ceramics. The displacement of the PZT film actuator driven at +- 20 V shows a butterfly like hysteresis. However, this butterfly shape shows opposite direction compared with the typical displacement curve of bulk PZT ceramics. This depressed displacement property of the PZT film appears to indicate bend motion in the vertical direction on the film surface since the film is not clamped, and it does not reflect the genuine piezoelectric property. For unipolar drive, the value of the displacement was about 220 nm at 20 V. The deflection amplitude of the diaphragm actuator showed a peak at 77.5 kHz. Therefore, it can be seen that the texture controlled PZT films is applicable to the film micro actuator.
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