Pyroelectric infrared sensor using a electron emission principle from ferroelectric thin plate

摘要

We propose a novel electron emission type infrared light sensor, which is constructed with a PZT ceramics plate and an Al electrode. A quartz plate separated the Al electrode and a PZT plate. The distance between the Al electrode and the PZT plate kept about 10μm. The PZT plate acts as an infrared light detector and a cathode electrode. The Al electrode is an anode. As the PZT plate was irradiated by infrared light in a vacuum chamber, an anode current was observed, and the anode current was lineally proportional to the incident infrared light power As pulsed infrared lights with 1 Hz frequency, emission electron was responded to the lights. From these fundamental experiments, the principle of this sensor was confirmed. This new principle infrared sensor is anticipated as high sensitive infrared sensor in the far-infrared region (above 3 μm).