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The experience of lead users in the adoption of minienvironment technology

机译:引导用户在采用小型环境技术方面的经验

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During the past few years, the use of minienvironment technology has rapidly emerged as an important strategy for containing cost and reducing particle contamination in semiconductor integrated circuit fabrication. However, implementation of minienvironment technology is not uniform throughout the semiconductor industry and, in particular, several well-recognized leading firms have been slow to adopt the technology. This paper discusses the experiences of several lead users of minienvironment technology based on data collected from interviews and an industry-wide survey. Generally speaking, lead users have found the technology to be quite beneficial on a number of important dimensions, including cost and contamination control. The experiences and perceptions of lead users provide a contrast to firms that have studied the technology closely, but do not have much actual experience using minienvironments. Lead users report significant cost savings and sub-Class 1 at the wafer surface, while non-users usually perceive far less benefit, particularly in terms of cost. One indication of the effectiveness of the technology is that many lead users continue to expand their investments in minienvironments. The author argues that, compared to industry leaders, lead users of minienvironments may provide greater insight into the usefulness of the technology because these firms are further along the learning curve.
机译:在过去几年中,使用小型技术的使用迅速成为含有成本和降低半导体集成电路制造中的粒子污染的重要策略。然而,在整个半导体行业的实施中的实施不均匀,特别是,采用技术的几家公认的良好的领先公司已经缓慢。本文讨论了基于从访谈和整个行业范围的调查中收集的数据的微型技术若干铅用户的经验。一般来说,铅用户发现该技术对许多重要尺寸非常有利,包括成本和污染控制。铅用户的经验和看法提供了与密切研究该技术的公司的对比,但使用小型环境没有太大的实际经验。铅用户在晶圆表面上报告了大量成本节省和子类1,而非用户通常会感知更少的益处,特别是在成本方面。一个迹象表明该技术的有效性是,许多铅民继续扩大他们对小学环境的投资。作者认为,与行业领导者相比,小学的主要用户可以更加了解技术的有用性,因为这些公司进一步沿着学习曲线。

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