DEVELOPMENT OF AN INNOVATIVE SENSOR FOR MEASURING TWO DEGREE-OF-FREEDOM MOTIONS OF SINGLE-AXIS LINEAR NANOPOSITIONOING STAGE

摘要

High precision multi degree-of-freedom (DOF) measurement is a key technology in industrial equipment (machine tools, lithography machines, or surface profilers) used in manufacturing or inspection systems [1-3]. Multi-DOF motion errors of the precision stages negatively affect the equipment's overall performance, which makes quality control of products difficult. Such motion errors, which are called parasitic or out-of-plane motions, include three linear errors (x, y and z axes) and three angular errors (pitch, roll and yaw axes). The three angular errors of linear stages are highly associated with Abbe errors and cosine errors and manufacturers or users must assess the performance boundaries of precision stages from design to production.