Nonimaging applications for microbolometer arrays

摘要

In an effort to leverage uncooled microbolometer technology, testing of bolometer performance in various nonimaging applications has been performed. One of these applications makes use of an uncooled microbolometer array as the sensing element for a laser beam analyzer. Results of the characterization of cw CO{sub}2 laser beams with this analyzer are given. A comparison with the results obtained with a commercial laser beam analyzer is made. Various advantages specific to microbolometer arrays for this application are identified. A second application makes use of microbolometers for absolute temperature measurements. The experimental method and results are described. The technique's limitations and possible implementations are discussed. Finally, the third application evaluated is related to the rapidly expanding field of biometry. It consists of using a modified microbolometer array for fingerprint sensing. The basic approach allowing the use of microbolometers for such an application is discussed. The results of a proof-of-principle experiment are described. Globally, the described work illustrates the fact that microbolometer array fabrication technology can be exploited for many important applications other than IR imaging.