Generally, micro parts in MEMS field are fabricated by Silicon-based micro-machining method such as photolithography and etching technology [1]. This silicon technology can produce rectangle grooves effectively and is suitable for mass production, too. On the other hand, precise machining method by a mechanical machine with nano-meter accuracy is getting attention in some field these days. This method has several advantages such as the production of exact and clear slope, and free shape with high quality and the selection of several kinds of material. The mechanical machining itself is not suitable for mass production, but as this machine can produce the test key part or a precise mold which will be used for mass production of plastics, it will be another merit for us to be able to make the total period of the development of the new device shorter effectively. In this paper, we would like to focus on machined samples of high precision parts using our super-nano friction-free machine, FANUC ROBOnanoUi.
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