This paper describes recent progresses on the development of a new type of latching micro magnetic relay that has recently been demonstrated. The device is based on preferential magnetization of a permalloy cantilever in a permanent external magnetic field. Switching between two stable states is accomplished by a short current pulse through an integrated coil underneath the cantilever. Some key features are summarized as follows. (1) Latching (bistable); (2) low energy consumption during switching (≤93 μJ, switching current ～60 mA, minimum switching pulse width ～0.2 ms); (3) low voltage operation (～5 V); (4) maximum DC current >500 mA; (5) capable of various switch configurations [single-pole-single-throw (SPST), multi-pole-single-throw (MPST), or multi-pole-double-throw (MPDT)]; (6) low contact resistance (≤50 mΩ); (7) operation in ambient environment; (8) lifetime > 5 × 10{sup}6 cycles at 240 μA, (9) batch fabrication using planar processing methods. We report new results on latching relays with multistrip permalloy cantilevers to improve the operation stability and with an off-center flexture bar to decrease the contact resistance.
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