First Wafer Delay and Setup: How to Measure, Define and Improve First Wafer Delays and Setup Times in Semiconductor Fabs

摘要

First Wafer Delay (FWD) has been identified as a barrier to reduced fab cycle time and increased equipment productivity. As such, initiatives to reduce first wafer delay have been proposed as a focal point for next generation semiconductor fabs, including both 450mm fabs as well as "300mm Prime" factories. FWD and Setup Time are major detractors for cycle time reduction, in particular for small lot manufacturing. The definition of FWD, causes, as well as methods for improving FWD are discussed, in addition to recommendations for future equipment and factory design.