Domain structure and residual-strain characterization of epitaxial Pb(Zr/sub x/Ti/sub 1-x/)O/sub 3/ thin films

摘要

Epitaxially grown [001], [101] and [111]-oriented tetragonal Pb(Zr/sub x/Ti/sub 1-x/)O/sub 3/ (PZT) thin films were prepared on [001], [110] and [111] SrTiO/sub 3/ substrates, respectively Growth domain configuration and lattice parameters were characterized using high resolution X-ray reciprocal space mapping measurement. In [001]-oriented PZT case, well-known c-domain and a-domain were observed. In other orientation case, [101] mixed with [110]-oriented PZT and [111] with small angle tilt orientation were observed for [110] and [111] SrTiO/sub 3/ substrates, respectively. Moreover, lattice parameters characterization showed almost fully growth strain relaxation at room temperature.