Application of TCAD software for numerical simulation of power semiconductor devices

机译：TCAD软件在功率半导体器件数值模拟中的应用

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摘要

The author presents a review of simulation and modeling possibilities both for assumed structures of semiconductor devices, and processes of technologies. The possibilities of ISE TCAD software are introduced briefly to illustrate some examples.

机译：作者介绍了对假定结构的半导体器件结构和技术过程的仿真和建模可能性的审查。简要介绍了ISE TCAD软件的可能性以说明一些示例。

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《International Conference on Experience of Designing and Application of CAD Systems in Microelectronics》|2001年||共2页
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作者
Malgorzata Langer; Jacek Podgorski;
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原文格式 PDF
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中图分类 TN4-53;
关键词
Numerical simulation; CAD; Power devices; VDMOS; IGBT;

机译：数值模拟;CAD;功率器件;VDMOS;IGBT;

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1. Simulation of Transient Processes in 4H-SiC Based Semiconductor Devices (Taking into Account the Incomplete Ionization of Dopants in the ATLAS Module of the SILVACO TCAD Software Package) [J] . Ivanov P. A., Potapov A. S., Samsonova T. P. Semiconductors . 2019,第3期

机译：基于4H-SiC基于半导体器件的瞬态过程模拟（考虑到Silvaco TCAD软件包的掺杂剂不完全电离）
2. Applications of TCAD Simulation Software for Fabrication and study of Process Variation Effects on Threshold Voltage in 180nm Floating-Gate Device [J] . Thinh Dang Cong, Toi Le Thanh, Hao Mai Tri, Advances in Science, Technology and Engineering Systems . 2020,第1期

机译：TCAD仿真软件对180nm浮栅装置阈值电压的工艺变化效应的制造和研究
3. An EBIC Model for TCAD Simulation to Determine the Surface Recombination Rate in Semiconductor Devices [J] . Andrea Kraxner, Frederic Roger, Bernhard Loeffler, Electron Devices, IEEE Transactions on . 2016,第11期

机译：用于TCAD仿真的EBIC模型，用于确定半导体器件的表面复合率
4. Application of TCAD software for numerical simulation of power semiconductor devices [C] . Langer, M., Podgorski, . 2001

机译：TCAD软件在功率半导体器件数值模拟中的应用
5. Two-dimensional submicron semiconductor device TCAD by hydrodynamic and numerical Boltzmann simulation [D] . Liang, Wenchao. 1996

机译：二维亚微米半导体器件TCAD通过流体动力学和数值Boltzmann仿真
6. Numerical simulation of ISFET structures for biosensing devices with TCAD tools [O] . Daniele Passeri, Arianna Morozzi, Keida Kanxheri, 2015

机译：用TCAD工具对生物传感设备的ISFET结构进行数值模拟
7. Applications of TCAD Simulation Software for Fabrication and study of Process Variation Effects on Threshold Voltage in 180nm Floating-Gate Device [O] . Thinh Dang Cong, Toi Le Thanh, Hao Mai Tri, 2020

机译：TCAD仿真软件对180nm浮栅装置阈值电压的工艺变化效应的制造和研究

Application of TCAD software for numerical simulation of power semiconductor devices

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