Interface Studies of Cu/α-Al_2O_3 (00.1) by Crystal Truncation Rod Analysis Using Synchrotron X-Ray

摘要

The surface structure of the Cu/α-Al_2O_3 system was studied to obtain a systematic understanding about the relationship between the growth and the resulting structures of the system and its effect on the film properties. Discussion is focused on the crystal truncation rod (CTR) data analysis measured by synchrotron X-ray at National Synchrotron Light Source (NSLS), Brookhaven National Laboratory (BNL). Theoretical equation of the diffracted CTR intensity profile of our system based upon the kinematical approximation was fitted to the measured data. The CTR analysis method provided us with the nature of the terminating layer sequence of the substrate, the structural relaxations (interatomic distance change) of the layers near the surface, nature of interface Cu atoms, and the interfacial or the surface roughness.