Atomic force microscopy studies of fracture surfaces from oxide/polymer interfaces

摘要

Atomic Force Microscopy (AFM) is used to characterize fracture surfaces in silicon oxide/silane adhesion promoter/BCB polymer systems. Fatigue striations were found on some samples, and these were correlated with the crack growth rate per fatigue cycle. X-ray Photoelectron Spectroscopy (XPS) was used to identify the species present on each surface, and it was found that striations only form when the fracture path is through the polymer.