Monolithic and quasimonolithic MM-wave modules and devices

摘要

The progress in mm-wave technology is associated with appearance of monolithic integrated circuits replacing hybrid integrated circuits. As soon as in the middle 80-s considerable results were achieved in this field [1]. Monolithic design using microstrip transmission lines had been spread on balanced mixers, frequency multipliers, low-noise IF and power amplifiers, phase shifters and so on. In the Scientific Research Institute of Semiconductor Devices (ISD), first attempts to create monolithic mm-wave circuits are related to early 80-s, and at the end of the decade the commercial balanced mixers (BM) based on monolithic technique - monolithic balanced mixers (MBM) - had been worked out for 3-mm and 2-mm wavebands [2]. Design principles of said MBMs were similar to those of fin-line devices [3], monolithic circuit being mounted longitudinally in a waveguide E-plane. However, there had been substantial distinctions, consisting in placing the MIC direr +1.y across the waveguide instead of mounting it into the finline gap. Later, the same principles had been applied for monolithic detectors, multipliers, modulators, limiters etc. In common, general enough technical feature had come around, applicable for a variety of monolithic mm-wave circuits as well as for RF devices based upon them.