Properties of ITO Thin Films Deposited on Polycarbonate Substrates by Ion Beam Assisted Deposition (IBAD)

摘要

ITO thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition (IBAD) technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region which is useful for some electromagnetic wave shielding applications.