CRUCIBLE DEVICE FOR THIN FILM DEPOSITION AND A THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME TO IMPROVE THE UNIFORMITY OF AN ORGANIC THIN FILM DEPOSITED ON A SUBSTRATE

摘要

PURPOSE: A crucible device for thin film deposition and a thin film deposition apparatus including the same are provided to improve the reliability of a thin film deposition process by controlling the uniformity of a deposited organic thin film.;CONSTITUTION: A crucible device for thin film deposition comprises a long crucible body(41) with open top for receiving an organic material and a crucible cover(42) covering the open top of the crucible body. The crucible cover has organic material injection holes(421) includes one or more linear holes(422) and one or more dot holes(423) located on the linear holes to extend the width of the linear holes.;COPYRIGHT KIPO 2012