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Need for Abrupt Transitions in Index of Refraction in the Soft X-ray Spectral Region

机译:需要在软X射线光谱区域中折射率突然过渡

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Gradual transitions in index of refraction from layer to layer, as in rugate coatings, can be advantageous. When absorption or the k-value is negligible, it can be shown that the first order reflection band is not significantly changed from when the transition between layers is "square" even to the case where it is sinusoidal. In most visible spectrum cases, the difference between the indices of the layers is almost exclusively in the real part of the refractive index, and it is that difference which causes Fresnel reflection at the interfaces. In the EUV/Soft X-ray region, the real parts of the indices are near unity, and therefore more layer pairs are required to achieve high reflection because of the low reflection at each interface. In these cases where one of the materials has a relatively high k-value, it can be shown that slow transitions in index from layer to layer are detrimental to the reflection desired. Even when interface roughness and interlayer diffusion are ignored per se, it can be shown that the layers with the highest k-values need to be as thin as possible to reduce absorption losses. This leads to sharp transitions between layers because the most absorbing material components are compressed into the smallest thicknesses practical.
机译:从层到层的折射率下逐渐过渡,如在粗糙的涂层中,可以是有利的。当吸收或k值可忽略不计时,可以示出从层之间的转变为“正方形”时,第一阶反射频带不会显着改变,甚至是正弦的情况。在大多数可见谱例中,层的指数之间的差异几乎完全在折射率的真实部分中,并且它是导致界面处的菲涅耳反射的差异。在EUV /软X射线区域中,指数的实际部分是靠近统一的,因此由于每个界面处的低反射,因此需要更多的层对来实现高反射。在这些材料具有相对高的K值的情况下,可以示出从层到层的索引慢过渡对所需的反射是有害的。即使当涉及界面粗糙度和层间扩散本身,也可以示出具有最高k值的层需要尽可能薄,以减少吸收损失。这导致层之间的急剧过渡,因为最具吸收材料部件被压缩成最小的厚度。

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