Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs

机译：超紧凑三维MMIC的新型制造技术

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A novel interconnection technology has been developed for ultra-compact three-dimensional (3D) MMICs. A sophisticated 3D interconnection structu has been successfully fabricated using iductively-coupled-plasma etching with a double-layer mask. This technology enables us to realize an ultra-compact MMICs.

机译：为超紧凑的三维（3D）MMIC开发了一种新颖的互连技术。已经使用具有双层掩模的逼硬耦合的等离子体蚀刻成功制造了复杂的3D互连结构。该技术使我们能够实现超紧凑的MMIC。

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《European solid-state device research conference》|1997年||共4页
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Suehiro Sugitani; Kiyomitsu Onodera; Shinji Aoyama;
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中图分类半导体集成电路（固体电路）;
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专利

1. Three-dimensional passive circuit technology for ultra-compact MMICs [J] . Hirano H., Nishikawa K. IEEE Transactions on Microwave Theory and Techniques . 1995,第12期

机译：适用于超紧凑型MMIC的三维无源电路技术
2. Folded U-Shaped Microwire Technology for Ultra-Compact Three-Dimensional MMIC's [J] . Onodera K., Hirano M. IEEE Transactions on Microwave Theory and Techniques . 1996,第12期

机译：折叠式U形微线技术，用于超紧凑型3维MMIC
3. Quick Development of Multifunctional MMICs by Using Three-Dimensional Masterslice MMIC Technology [J] . Ichihiko TOYODA, Makoto HIRANO, Masami TOKUMITSU IEICE Transactions on Electronics . 1999,第11期

机译：利用三维Masterslice MMIC技术快速开发多功能MMIC
4. Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs [C] . Suehiro Sugitani, Kiyomitsu Onodera, Shinji Aoyama Proceedings of the 27th European solid-state device research conference . 1997

机译：超紧凑型三维MMIC的新型制造技术
5. Design, fabrication and deployment of a miniaturized spectrometer radiometer based on MMIC technology for tropospheric water vapor profiling [D] . Iturbide-Sanchez, Flavio 2007

机译：基于MMIC技术的对流层水蒸气剖面的小型光谱仪辐射计的设计，制造和部署
6. Human Cartilage Tissue Fabrication Using Three-dimensional Inkjet Printing Technology [O] . Xiaofeng Cui, Guifang Gao, Tomo Yonezawa, 2014

机译：使用三维喷墨打印技术制造人体软骨组织
7. Characterization and Modeling of DHBT in InP/GaAsSb Technology for the Design and Fabrication of a Ka Band MMIC Oscillator [O] . S. Laurent, J. C. Nallatamby, M. Prigent, 2012

机译：用于设计和制作Ka波段mmIC振荡器的Inp / Gaassb技术中DHBT的表征和建模
8. GaAs Varactor Diode MMIC (Monolithic Microwave Integrated Circuit) Fabrication Technology [R] . Hughes, B. T., Parker, J. T., Woodward, J. 1987

机译：Gaas变容二极管mmIC（单片微波集成电路）制造技术

Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs

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