Polyimide Optical Waveguide with Multi-Fan-Out for Multichip Module Application

摘要

We developed a polymide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The porpagation direction ofthe signal light is changed from horizontal to vertical and from vertical to horizontal uisng aluminum micromirrors in this waveguide. A significant increase of photodiode current was observed when a signal light impinged on the photodiode after it was introduced into this waveguide and then the propagation direction was bent by aluminum micromirror.