MOCVD OF CHROMIUM CARBIDE FROM BIS-ETHYL- BENZENE-CHROMIUM

摘要

Chromium carbide (Cr_xC_y) is suitable as a friction and wear reducing coating in many industrial applications. Metal organic chemical vapor deposition (MOCVD) allows to produce this hard coating at temperatures below 550°C and enables to coat temperature sensitive materials e.g. metals and alloys. The effect of the deposition conditions (deposition temperature, total pressure, precursor concentration, residence time) to the deposition rate (dpr) of Cr_xC_y is investigated and a preliminary model for the deposition rate is proposed. Morphology, chemical composition and structure of the deposited Cr_xC_y-layers are investigated using SEM, AES and XRD.